get_metrology_object_paramT_get_metrology_object_paramGetMetrologyObjectParamGetMetrologyObjectParam (Operator)

Name

get_metrology_object_paramT_get_metrology_object_paramGetMetrologyObjectParamGetMetrologyObjectParam — Get one or several parameters of a metroloy model.

Signature

Description

get_metrology_object_paramget_metrology_object_paramGetMetrologyObjectParamGetMetrologyObjectParamGetMetrologyObjectParam allows to access the parameters that are used by a metrology object.

For an explanation of the concept of 2D metrology see the introduction of chapter 2D Metrology.

The metrology model is defined by the handle MetrologyHandleMetrologyHandleMetrologyHandleMetrologyHandlemetrologyHandle. The parameter IndexIndexIndexIndexindex determines for which metrology objects the information is accessed. With IndexIndexIndexIndexindex set to 'all'"all""all""all""all", the parameters of all metrology objects are accessed. The names of the desired parameters are passed in the generic parameter GenParamNameGenParamNameGenParamNameGenParamNamegenParamName, the corresponding values are returned in GenParamValueGenParamValueGenParamValueGenParamValuegenParamValue in the same order. All these general parameters can be set and changed at any time with the operator set_metrology_object_paramset_metrology_object_paramSetMetrologyObjectParamSetMetrologyObjectParamSetMetrologyObjectParam. Parameters that describe the geometry of an object can only be set by creating the metrology object with the operators add_metrology_object_circle_measureadd_metrology_object_circle_measureAddMetrologyObjectCircleMeasureAddMetrologyObjectCircleMeasureAddMetrologyObjectCircleMeasure, add_metrology_object_ellipse_measureadd_metrology_object_ellipse_measureAddMetrologyObjectEllipseMeasureAddMetrologyObjectEllipseMeasureAddMetrologyObjectEllipseMeasure, add_metrology_object_line_measureadd_metrology_object_line_measureAddMetrologyObjectLineMeasureAddMetrologyObjectLineMeasureAddMetrologyObjectLineMeasure, or add_metrology_object_rectangle2_measureadd_metrology_object_rectangle2_measureAddMetrologyObjectRectangle2MeasureAddMetrologyObjectRectangle2MeasureAddMetrologyObjectRectangle2Measure.

The following parameters can be accessed:

• Valid for all types of metrology objects:

  'min_score'"min_score""min_score""min_score""min_score", 'num_instances'"num_instances""num_instances""num_instances""num_instances", 'instances_outside_measure_regions'"instances_outside_measure_regions""instances_outside_measure_regions""instances_outside_measure_regions""instances_outside_measure_regions":

  The meaning and the use of these parameters is described with the operator set_metrology_object_paramset_metrology_object_paramSetMetrologyObjectParamSetMetrologyObjectParamSetMetrologyObjectParam.

  'rand_seed'"rand_seed""rand_seed""rand_seed""rand_seed", 'distance_threshold'"distance_threshold""distance_threshold""distance_threshold""distance_threshold", 'max_num_iterations'"max_num_iterations""max_num_iterations""max_num_iterations""max_num_iterations":

  The meaning and the use of these parameters is described with the operator set_metrology_object_paramset_metrology_object_paramSetMetrologyObjectParamSetMetrologyObjectParamSetMetrologyObjectParam.

  'measure_length1'"measure_length1""measure_length1""measure_length1""measure_length1",'measure_length2'"measure_length2""measure_length2""measure_length2""measure_length2":

  The meaning and the use of these parameters is described with the operator set_metrology_object_paramset_metrology_object_paramSetMetrologyObjectParamSetMetrologyObjectParamSetMetrologyObjectParam.

  'measure_sigma'"measure_sigma""measure_sigma""measure_sigma""measure_sigma", 'measure_threshold'"measure_threshold""measure_threshold""measure_threshold""measure_threshold", 'measure_transition'"measure_transition""measure_transition""measure_transition""measure_transition", 'measure_select'"measure_select""measure_select""measure_select""measure_select":

  The meaning and the use of these parameters is described with the operator measure_posmeasure_posMeasurePosMeasurePosMeasurePos by the parameters SigmaSigmaSigmaSigmasigma, ThresholdThresholdThresholdThresholdthreshold, TransitionTransitionTransitionTransitiontransition, and SelectSelectSelectSelectselect.

  'measure_interpolation'"measure_interpolation""measure_interpolation""measure_interpolation""measure_interpolation":

  The meaning and the use of this parameter is described with the operator gen_measure_rectangle2gen_measure_rectangle2GenMeasureRectangle2GenMeasureRectangle2GenMeasureRectangle2 by the parameter InterpolationInterpolationInterpolationInterpolationinterpolation.

  'measure_distance_min'"measure_distance_min""measure_distance_min""measure_distance_min""measure_distance_min":

  Returns the minimum distance between the centers of the generated measure regions, which depends on the geometry of the object and the value of the input parameter 'measure_distance'"measure_distance""measure_distance""measure_distance""measure_distance" or the value of the input parameter 'num_measures'"num_measures""num_measures""num_measures""num_measures" of the operator set_metrology_object_paramset_metrology_object_paramSetMetrologyObjectParamSetMetrologyObjectParamSetMetrologyObjectParam. For a metrology object circle or a metrology object line the distances between measure regions are uniformly distributed. Therefore, 'measure_distance_min'"measure_distance_min""measure_distance_min""measure_distance_min""measure_distance_min" and 'measure_distance_max'"measure_distance_max""measure_distance_max""measure_distance_max""measure_distance_max" return the same value.

  'measure_distance_max'"measure_distance_max""measure_distance_max""measure_distance_max""measure_distance_max":

  Returns the maximum distance between the centers of the generated measure regions, which depends on the geometry of the object and the value of the input parameter 'measure_distance'"measure_distance""measure_distance""measure_distance""measure_distance" or the value of the input parameter 'num_measures'"num_measures""num_measures""num_measures""num_measures" of the operator set_metrology_object_paramset_metrology_object_paramSetMetrologyObjectParamSetMetrologyObjectParamSetMetrologyObjectParam. For a metrology object circle or a metrology object line the distances between measure regions are uniformly distributed. Therefore, 'measure_distance_min'"measure_distance_min""measure_distance_min""measure_distance_min""measure_distance_min" and 'measure_distance_max'"measure_distance_max""measure_distance_max""measure_distance_max""measure_distance_max" return the same value.

  'num_measures'"num_measures""num_measures""num_measures""num_measures":

  Returns the number of generated measure regions, which depends on the geometry of the object and the value of the input parameter 'measure_distance'"measure_distance""measure_distance""measure_distance""measure_distance" or the value of the input parameter 'num_measures'"num_measures""num_measures""num_measures""num_measures" of the operator set_metrology_object_paramset_metrology_object_paramSetMetrologyObjectParamSetMetrologyObjectParamSetMetrologyObjectParam.

  'object_type'"object_type""object_type""object_type""object_type":

  Type of the geometric shape of the metrology object. For a metrology object of type circle, the output parameter GenParamValueGenParamValueGenParamValueGenParamValuegenParamValue contains the value 'circle'"circle""circle""circle""circle". For a metrology object of type ellipse, the output parameter GenParamValueGenParamValueGenParamValueGenParamValuegenParamValue contains the value 'ellipse'"ellipse""ellipse""ellipse""ellipse". For a metrology object of type line, the output parameter GenParamValueGenParamValueGenParamValueGenParamValuegenParamValue contains the value 'line'"line""line""line""line". For a metrology object of type rectangle, the output parameter GenParamValueGenParamValueGenParamValueGenParamValuegenParamValue contains the value 'rectangle'"rectangle""rectangle""rectangle""rectangle".

  'object_params'"object_params""object_params""object_params""object_params":

  The parameters of the geometric shape of the metrology object. For a metrology object of type circle, the output parameter GenParamValueGenParamValueGenParamValueGenParamValuegenParamValue contains the geometry of the circle in the following order: 'row'"row""row""row""row", 'column'"column""column""column""column", 'radius'"radius""radius""radius""radius". The meaning and the use of these parameters is described with the operator add_metrology_object_circle_measureadd_metrology_object_circle_measureAddMetrologyObjectCircleMeasureAddMetrologyObjectCircleMeasureAddMetrologyObjectCircleMeasure. For a metrology object of type ellipse, the output parameter GenParamValueGenParamValueGenParamValueGenParamValuegenParamValue contains the geometry of the ellipse in the following order: 'row'"row""row""row""row", 'column'"column""column""column""column", 'phi'"phi""phi""phi""phi", 'radius1'"radius1""radius1""radius1""radius1", 'radius2'"radius2""radius2""radius2""radius2". The meaning and the use of these parameters is described with the operator add_metrology_object_ellipse_measureadd_metrology_object_ellipse_measureAddMetrologyObjectEllipseMeasureAddMetrologyObjectEllipseMeasureAddMetrologyObjectEllipseMeasure. For a metrology object of type line, the output parameter GenParamValueGenParamValueGenParamValueGenParamValuegenParamValue contains the geometry of the line in the following order: 'row_begin'"row_begin""row_begin""row_begin""row_begin", 'column_begin'"column_begin""column_begin""column_begin""column_begin", 'row_end'"row_end""row_end""row_end""row_end", 'column_end'"column_end""column_end""column_end""column_end". The meaning and the use of these parameters is described with the operator add_metrology_object_line_measureadd_metrology_object_line_measureAddMetrologyObjectLineMeasureAddMetrologyObjectLineMeasureAddMetrologyObjectLineMeasure. For a metrology object of type rectangle, the output parameter GenParamValueGenParamValueGenParamValueGenParamValuegenParamValue contains the geometry of the rectangle in the following order: 'row'"row""row""row""row", 'column'"column""column""column""column", 'phi'"phi""phi""phi""phi", 'length1'"length1""length1""length1""length1", 'length2'"length2""length2""length2""length2". The meaning and the use of these parameters is described with the operator add_metrology_object_rectangle2_measureadd_metrology_object_rectangle2_measureAddMetrologyObjectRectangle2MeasureAddMetrologyObjectRectangle2MeasureAddMetrologyObjectRectangle2Measure.

• Only valid for a metrology object of type circle:

  'row'"row""row""row""row", 'column'"column""column""column""column", 'radius'"radius""radius""radius""radius":

  These are parameters for a metrology object of type circle. The meaning and the use of these parameters is described with the operator add_metrology_object_circle_measureadd_metrology_object_circle_measureAddMetrologyObjectCircleMeasureAddMetrologyObjectCircleMeasureAddMetrologyObjectCircleMeasure.

• Only valid for a metrology object of type ellipse:

  'row'"row""row""row""row", 'column'"column""column""column""column", 'phi'"phi""phi""phi""phi", 'radius1'"radius1""radius1""radius1""radius1", 'radius2'"radius2""radius2""radius2""radius2":

  These are parameters for a metrology object of type ellipse. The meaning and the use of these parameters is described with the operator add_metrology_object_ellipse_measureadd_metrology_object_ellipse_measureAddMetrologyObjectEllipseMeasureAddMetrologyObjectEllipseMeasureAddMetrologyObjectEllipseMeasure.

• Only valid for a metrology object of type line:

  'row_begin'"row_begin""row_begin""row_begin""row_begin", 'column_begin'"column_begin""column_begin""column_begin""column_begin", 'row_end'"row_end""row_end""row_end""row_end",'column_end'"column_end""column_end""column_end""column_end":

  These are parameters for a metrology object of type line. The meaning and the use of these parameters is described with the operator add_metrology_object_line_measureadd_metrology_object_line_measureAddMetrologyObjectLineMeasureAddMetrologyObjectLineMeasureAddMetrologyObjectLineMeasure.

• Only valid for a metrology object of type rectangle:

  'row'"row""row""row""row", 'column'"column""column""column""column", 'phi'"phi""phi""phi""phi", 'length1'"length1""length1""length1""length1", 'length2'"length2""length2""length2""length2":

  These are parameters for a metrology object of type rectangle. The meaning and the use of these parameters is described with the operator add_metrology_object_rectangle2_measureadd_metrology_object_rectangle2_measureAddMetrologyObjectRectangle2MeasureAddMetrologyObjectRectangle2MeasureAddMetrologyObjectRectangle2Measure.

Execution Information

• Multithreading type: reentrant (runs in parallel with non-exclusive operators).
• Multithreading scope: global (may be called from any thread).
• Processed without parallelization.

Parameters

Result

If the parameters are valid, the operator get_metrology_object_paramget_metrology_object_paramGetMetrologyObjectParamGetMetrologyObjectParamGetMetrologyObjectParam returns the value 2 (H_MSG_TRUE). If necessary, an exception is raised.

Possible Predecessors

get_metrology_object_indicesget_metrology_object_indicesGetMetrologyObjectIndicesGetMetrologyObjectIndicesGetMetrologyObjectIndices, set_metrology_object_paramset_metrology_object_paramSetMetrologyObjectParamSetMetrologyObjectParamSetMetrologyObjectParam

Possible Successors

set_metrology_object_paramset_metrology_object_paramSetMetrologyObjectParamSetMetrologyObjectParamSetMetrologyObjectParam

See also

get_metrology_object_fuzzy_paramget_metrology_object_fuzzy_paramGetMetrologyObjectFuzzyParamGetMetrologyObjectFuzzyParamGetMetrologyObjectFuzzyParam, get_metrology_object_num_instancesget_metrology_object_num_instancesGetMetrologyObjectNumInstancesGetMetrologyObjectNumInstancesGetMetrologyObjectNumInstances

Module

2D Metrology